We report on fabrication of metalnanotubes in semiconductor nanotemplates possessing ordered two-dimensional hexagonal arrays of pores grown in n-InP crystalline substrates using anodic etching in neutral electrolyte. Electrochemical pulsed deposition of arrays of Pt nanotubes with diameters of 70 and 140 nm is demonstrated. The produced metallo-semiconductor tubular structure behaves like a layered nanomaterial allowing one to easily cleave thin films consisting of rows of Pt nanotubes in semiconductorenvelope.

Keywords: Anodic etching; Semiconductor nanotemplate; Electrochemical deposition; Metalnanotubes